Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362368 | Substrate with silicon carbide film, method for producing substrate with silicon carbide film, and semiconductor device | — | 2016-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362368 | Substrate with silicon carbide film, method for producing substrate with silicon carbide film, and semiconductor device | — | 2016-06-07 |