Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499394 | MEMS device and method of manufacturing the same | — | 2016-11-22 |
| 9434605 | MEMS device | — | 2016-09-06 |
| 9434607 | MEMS device | — | 2016-09-06 |
| 9388039 | MEMS device and method of manufacturing the same | — | 2016-07-12 |
| 9331668 | Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same | — | 2016-05-03 |
| 9285522 | Tilt structure | — | 2016-03-15 |
| 9285271 | Sloped structure, method for manufacturing sloped structure, and spectrum sensor | — | 2016-03-15 |
| 9278850 | MEMS device and method of manufacturing the same | — | 2016-03-08 |