Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9461615 | Vibrator element, vibrator, oscillator, electronic apparatus, and moving object | Takashi Yamazaki, Tsuyoshi Tabata, Hidekazu Yanagisawa | 2016-10-04 |
| 9365411 | MEMS device and method for manufacturing the same | — | 2016-06-14 |