Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9228254 | Cathode sputtering gas distribution apparatus | Tatsuru Tanaka | 2016-01-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9228254 | Cathode sputtering gas distribution apparatus | Tatsuru Tanaka | 2016-01-05 |