Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368383 | Substrate treating apparatus with substrate reordering | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-06-14 |
| 9299596 | Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-03-29 |
| 9230834 | Substrate treating apparatus | Yoshiteru Fukutomi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-01-05 |