Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449861 | Substrate processing apparatus | Akito Hatano, Koji Hashimoto | 2016-09-20 |
| 9437464 | Substrate treating method for treating substrates with treating liquids | — | 2016-09-06 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449861 | Substrate processing apparatus | Akito Hatano, Koji Hashimoto | 2016-09-20 |
| 9437464 | Substrate treating method for treating substrates with treating liquids | — | 2016-09-06 |