Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455134 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Manabu OKUTANI, Masayuki OTSUJI | 2016-09-27 |
| 9259758 | Substrate treatment method and substrate treatment apparatus | Manabu OKUTANI | 2016-02-16 |