Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477162 | Substrate processing method | Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Shuichi Yasuda, Tetsuya Hamada | 2016-10-25 |
| 9375748 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Yukihiko Inagaki | 2016-06-28 |