Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9327918 | Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate | Motoyasu Hayashi, Mitsukazu Takahashi | 2016-05-03 |
| 9324602 | Substrate inverting apparatus and substrate processing apparatus | Takashi Shinohara, Hiroshi Kato | 2016-04-26 |