Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466523 | Contact hole collimation using etch-resistant walls | Takuya Futase, Katsuo Yamada, Keita Kumamoto, Hirotada Tobita | 2016-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466523 | Contact hole collimation using etch-resistant walls | Takuya Futase, Katsuo Yamada, Keita Kumamoto, Hirotada Tobita | 2016-10-11 |