Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9525398 | Single crystal micromechanical resonator and fabrication methods thereof | Roy H. Olsson, Thomas A. Friedmann, Sara Jensen Homeijer, Michael Wiwi, Khalid Mikhiel Hattar +2 more | 2016-12-20 |