Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520301 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Go-jun Kim, Vladimir Volynets, Sang Jin An, Hee-jeon Yang, Sang Heon Lee +2 more | 2016-12-13 |