Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9229327 | Electron beam exposure apparatus and method of detecting error using the same | Sang-Hee Lee, Seong-yong Moon | 2016-01-05 |
SY
Sang-Yong Yu
Overall (2016): #237,268 of 481,213Top 50%
1
Patents 2016