Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484215 | Sulfur and fluorine containing etch chemistry for improvement of distortion and bow control for har etch | Sanghyuk CHOI, Joseph James VEGH | 2016-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484215 | Sulfur and fluorine containing etch chemistry for improvement of distortion and bow control for har etch | Sanghyuk CHOI, Joseph James VEGH | 2016-11-01 |