Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9321144 | Polishing head in chemical mechanical polishing apparatus and chemical mechanical polishing apparatus including the same | Chang Gyu Woo, Sung-Ho Shin, Joo Yeop Nam | 2016-04-26 |