Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519220 | Method, photolithography method, and method of manufacturing a semiconductor device using a pellicle film | Su-Young Lee, Tae Geun Kim | 2016-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519220 | Method, photolithography method, and method of manufacturing a semiconductor device using a pellicle film | Su-Young Lee, Tae Geun Kim | 2016-12-13 |