Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9421668 | CMP apparatus | Seh Kwang Lee, Youn Chul Kim, Joo Han Lee, Jae-Kwang Choi | 2016-08-23 |
| 9314901 | CMP pad conditioner, and method for producing the CMP pad conditioner | Seh Kwang Lee, Youn Chul Kim, Joo Han Lee, Jae-Kwang Choi | 2016-04-19 |