Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230922 | Precursor composition for deposition of silicon dioxide film and method for fabricating semiconductor device using the same | Han-Jin Lim, Bong-Hyun Kim, Seok-Woo Nam, Dong-Woon Shin, Soo-Jin Hong | 2016-01-05 |