Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466490 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices | Sanghyun Kim, Chalykh Roman, Jongju Park, Seongsue Kim | 2016-10-11 |