Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490137 | Method for structuring a layered structure from two semiconductor layers, and micromechanical component | Simon Armbruster, Frank Fischer, Johannes Baader | 2016-11-08 |
| 9461234 | Manufacturing method for a piezoelectric layer arrangement and corresponding piezoelectric layer arrangement | Thomas Mayer, Juergen Butz, Jochen Tomaschko, Christof Single | 2016-10-04 |
| 9360664 | Micromechanical component and method for producing a micromechanical component | Simon Armbruster, Helmut Grutzeck, Frank Schatz, Joerg Muchow, Frederic Njikam Njimonzie +2 more | 2016-06-07 |