Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9434606 | Micromechanical inertial sensor and method for manufacturing same | Mirko Hattass, Daniel Christoph Meisel | 2016-09-06 |
| 9291455 | Method for operating and/or for measuring a micromechanical device, and micromechanical device | Christoph Gauger, Patrick Wellner | 2016-03-22 |
| 9279822 | Micromechanical structure and method for manufacturing a micromechanical structure | — | 2016-03-08 |
| 9266720 | Hybrid integrated component | Axel Franke, Jens Frey, Heribert Weber, Frank Fischer, Patrick Wellner +2 more | 2016-02-23 |
| 9261363 | Yaw rate sensor | Reinhard Neul, Axel Franke, Marco Quander, Joerg Hauer, Udo-Martin Gomez +1 more | 2016-02-16 |
| 9229020 | Micropatterned component and method for manufacturing a micropatterned component | — | 2016-01-05 |