Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9428378 | Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component | Lars Tebje, Heiko Stahl, Jullian Gonska, Reinhard Neul | 2016-08-30 |
| 9233841 | Production process for a micromechanical component and micromechanical component | Christoph Schelling, Mirko Hattass, Benjamin Schmidt | 2016-01-12 |