Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390953 | Substrate damage detection device, substrate transfer robot with substrate damage detection device, and substrate damage detection method | Takashi Nagano, Takumi Kobayashi | 2016-07-12 |
| 9259841 | Carrier device | Sayako Takarabe, Hideki Matsuo | 2016-02-16 |