Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464350 | Deposition substrate temperature and monitoring | Anatoly Kuzmichev, Igor V. Belousov, Yuriy G. Kononenko, Oleg G. Pankov, Dmitriy Ryzhikov | 2016-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464350 | Deposition substrate temperature and monitoring | Anatoly Kuzmichev, Igor V. Belousov, Yuriy G. Kononenko, Oleg G. Pankov, Dmitriy Ryzhikov | 2016-10-11 |