Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9340865 | Thin film-manufacturing apparatus,thin film-manufacturing method,and substrate-conveying roller | Kazuyoshi Honda, Satoshi Shibutani, Yasuharu Shinokawa, Noriyuki Uchida, Noriaki Amo | 2016-05-17 |