Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9363617 | Semiconductor device having a base, a cavity, a diaphragm, and a substrate | Tomofumi Maekawa | 2016-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9363617 | Semiconductor device having a base, a cavity, a diaphragm, and a substrate | Tomofumi Maekawa | 2016-06-07 |