Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373531 | Substrate transfer device, substrate processing apparatus, and substrate accommodation method | Katsuhiro Morikawa, Issei Ueda | 2016-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373531 | Substrate transfer device, substrate processing apparatus, and substrate accommodation method | Katsuhiro Morikawa, Issei Ueda | 2016-06-21 |