Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9346670 | MEMS device with differential vertical sense electrodes | Margaret L. Kniffin | 2016-05-24 |
| 9316665 | Estimation of sidewall skew angles of a structure | Kemiao Jia | 2016-04-19 |
| 9242851 | MEMS device with differential vertical sense electrodes | Margaret L. Kniffin | 2016-01-26 |