Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484185 | Charged particle beam writing apparatus, and charged particle beam writing method | Mizuna Suganuma, Yasuo Kato | 2016-11-01 |
| 9336988 | Multi charged particle beam writing apparatus, and multi charged particle beam writing method | — | 2016-05-10 |
| 9268234 | Charged particle beam lithography apparatus and charged particle beam pattern writing method | — | 2016-02-23 |