HM

Hironobu Matsumoto

NT Nuflare Technology: 2 patents #8 of 78Top 15%
Overall (2016): #138,450 of 481,213Top 30%
2
Patents 2016

Issued Patents 2016

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9478391 Charged particle beam writing apparatus and charged particle beam writing method — 2016-10-25
9437396 Multi charged particle beam writing apparatus, and multi charged particle beam writing method — 2016-09-06