Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519217 | Chemically amplified positive resist composition and patterning process | Katsuya Takemura | 2016-12-13 |
| 9513550 | Positive resist composition and pattern forming process | Hideyoshi Yanagisawa | 2016-12-06 |
| 9238708 | Organosiloxane-modified novolak resin and making method | Hideyoshi Yanagisawa | 2016-01-19 |