Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514915 | Method for evaluating charged particle beam drawing apparatus | Takayuki Ohnishi | 2016-12-06 |
| 9291444 | Light reflection mechanism, optical interferometer and spectrometric analyzer | Shinya Matsuda | 2016-03-22 |