Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500963 | Movable body apparatus, exposure apparatus and device manufacturing method | — | 2016-11-22 |
| 9366974 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Hiroshi Shirasu, Yoshihiko Kudo | 2016-06-14 |
| 9250543 | Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method | — | 2016-02-02 |