TH

Tsuneyuki Hagiwara

NI Nikon: 1 patents #89 of 289Top 35%
Overall (2016): #196,160 of 481,213Top 45%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9513558 Exposure apparatus, exposure method, and method for producing device Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Yasushi Mizuno +3 more 2016-12-06