Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240339 | Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus | Hidehiro Maeda | 2016-01-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240339 | Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus | Hidehiro Maeda | 2016-01-19 |