Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329492 | Apparatus and method to control vacuum at porous material using multiple porous materials | Alex Ka Tim Poon, Derek Coon | 2016-05-03 |
| 9285683 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2016-03-15 |