Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477156 | Reflecting optical member, optical system, exposure apparatus, and device manufacturing method | Hideo Takino, Tetsuya Tomofuji, Hideki Komatsuda | 2016-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477156 | Reflecting optical member, optical system, exposure apparatus, and device manufacturing method | Hideo Takino, Tetsuya Tomofuji, Hideki Komatsuda | 2016-10-25 |