Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9322788 | Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device | Yoshihiko Fujimori, Shinsuke Takeda | 2016-04-26 |
| 9240356 | Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device | Yoshihiko Fujimori, Shinsuke Takeda | 2016-01-19 |