Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355855 | Plasma etching apparatus component and manufacturing method for the same | Michio Sato, Takashi Rokutanda, Masashi Nakatani | 2016-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355855 | Plasma etching apparatus component and manufacturing method for the same | Michio Sato, Takashi Rokutanda, Masashi Nakatani | 2016-05-31 |