Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9394206 | Method for producing electrostatic chuck and electrostatic chuck | Masahito Eguchi, Takuji Kimura | 2016-07-19 |
| 9306095 | Solar cell and method for manufacturing same | — | 2016-04-05 |