Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9461238 | Piezoelectric thin film, piezoelectric element, and manufacturing method thereof | Makoto Kubota, Kenichi Takeda, Jumpei Hayashi, Mikio Shimada, Masaki Azuma +2 more | 2016-10-04 |
| 9362482 | Method of producing piezoelectric device using Be, Fe and Co under excess oxygen atmosphere | Makoto Kubota, Kenji Takashima, Masaki Azuma, Yoshitaka Nakamura, Takashi Iijima +1 more | 2016-06-07 |