Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401396 | Method for manufacturing semiconductor device and plasma oxidation treatment method | Kanta Abe, Hidekazu Miyairi, Tetsuhiro Tanaka, Yoshitaka Yamamoto | 2016-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401396 | Method for manufacturing semiconductor device and plasma oxidation treatment method | Kanta Abe, Hidekazu Miyairi, Tetsuhiro Tanaka, Yoshitaka Yamamoto | 2016-07-26 |