Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9228260 | Wafer processing chamber, heat treatment apparatus and method for processing wafers | Tsai-Fu Hsiao, Tai-Chun Huang, Tze-Liang Lee | 2016-01-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9228260 | Wafer processing chamber, heat treatment apparatus and method for processing wafers | Tsai-Fu Hsiao, Tai-Chun Huang, Tze-Liang Lee | 2016-01-05 |