Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9404181 | Plasma enhanced atomic layer deposition system | Bo-Heng Liu, Chi-Chung Kei, Meng-Yen Tsai, Chih-Chieh Yu, Chien-Nan Hsiao +1 more | 2016-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9404181 | Plasma enhanced atomic layer deposition system | Bo-Heng Liu, Chi-Chung Kei, Meng-Yen Tsai, Chih-Chieh Yu, Chien-Nan Hsiao +1 more | 2016-08-02 |