Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389601 | Substrate processing apparatus, substrate processing system, control method for substrate processing apparatus and storage medium | Yasunori Nakamura, Naohiko Kawashima | 2016-07-12 |
| 9238396 | Air-conditioning apparatus for vehicle | Taichi Uto, Hidetaka Adachi, Hisanobu Nakamura | 2016-01-19 |