Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9463976 | MEMS fabrication process with two cavities operating at different pressures | Robert F. Steimle | 2016-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9463976 | MEMS fabrication process with two cavities operating at different pressures | Robert F. Steimle | 2016-10-11 |