Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9468042 | Apparatus for producing trichlorosilane | Masami Miyake, Kazuki Mizushima, Naoya Murakami | 2016-10-11 |
| 9315895 | Apparatus for producing polycrystalline silicon | Takashi Miyazawa | 2016-04-19 |