Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472380 | Silicon part for plasma etching apparatus and method of producing the same | Yoshinobu Nakada | 2016-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472380 | Silicon part for plasma etching apparatus and method of producing the same | Yoshinobu Nakada | 2016-10-18 |