Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9365770 | Etching solution for copper/molybdenum-based multilayer thin film | Satoshi Okabe, Taketo Maruyama | 2016-06-14 |
| 9365934 | Liquid composition used in etching copper- and titanium-containing multilayer film, etching method in which said composition is used, method for manufacturing multilayer-film wiring, and substrate | Kunio Yube, Satoshi Tamai | 2016-06-14 |