Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464068 | Allyl compound and method for producing the same | — | 2016-10-11 |
| 9354516 | Resist composition | Masaaki Takasuka, Yu Okada, Yumi Ochiai | 2016-05-31 |
| 9316913 | Underlayer film-forming material for lithography, underlayer film for lithography, and pattern formation method | Go Higashihara, Naoya Uchiyama | 2016-04-19 |
| 9239517 | Compound, radiation-sensitive composition and resist pattern formation method | — | 2016-01-19 |